Following the announcement in February 2018 of an initial £1.55m investment to fund the development of a unique time-resolved high-resolution transmission electron microscope, the purchase of the JEOL FIB with assistance from the MRC, Diamond Light Source and the RCaH, is the first stage in what will be a long term project.
The newly developed JIB-4700F utilises a Focussed Ion Beam column with a high-current density Ga ion source providing up to 90nA of probe-current. The high current provides for the fast ion milling and processing of specimens. The SEM optics feature an "in-lens Schottky-emission electron gun" that produces an electron beam with a maximum probe-current of 300nA, which allows for simultaneous high-resolution observations and fast analyses. This field emission SEM additionally features a hybrid conical objective lens, GENTLEBEAM™ (GB) mode and an in-lens detector system to deliver a guaranteed resolution of 1.6nm at a low accelerating voltage of 1 kV.
In parallel with high-speed cross-section processing by FIB, high-resolution SEM observations and fast analyses can be conducted utilizing energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD). Additionally, a three-dimensional analysis function that automatically captures SEM images at regular intervals during cross-section processing is provided as one of the JIB-4700F's standard features.
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