JEOL Wafer Inspection SEM

JEOL wafer and mask review tools improve yield management with unique capabilities that help rapidly detect minute imperfections and killer defects. 360 degree wafer edge review, high tilt, and fully automated rotation enhance the automatic defect classification capability of our high resolution, high throughput wafer inspection SEMs for 150-300mm wafers. JEOL provides a wide range of SEM based review solutions for the most advanced designs and highest throughputs.

Available Models

JWS-2000	Inline SEM for 200 mm wafer
JWS-3000	Inline SEM for 300 mm wafer
JWS-7855S	Mask Observation Scanning Microscope
JFAS-7000BT	Beam Tracer
WM-7000	Wafer Surface Inspector
WM-10	Wafer Surface Inspector
WM-7	Wafer Surface Inspector

JEOL Wafer Inspection SEM

JEOL wafer and mask review tools improve yield management with unique capabilities that help rapidly detect minute imperfections and killer defects. 360 degree wafer edge review, high tilt, and fully automated rotation enhance the automatic defect classification capability of our high resolution, high throughput wafer inspection SEMs for 150-300mm wafers. JEOL provides a wide range of SEM based review solutions for the most advanced designs and highest throughputs.

Available Models

JWS-3000	Inline SEM for 300 mm wafer
JFAS-7000BT	Beam Tracer
WM-7000	Wafer Surface Inspector
WM-10	Wafer Surface Inspector
WM-7	Wafer Surface Inspector

Please Note

Not all JEOL products are available in every country. For specific information and more details about JEOL products available in your area, contact your local JEOL office or sales representative. Thank you.