WM-10 Wafer Surface Inspector

WM-10A low cost of operation and minimal investment tool for wafer surface defect detection, the WM-10 features sensitivity of 48nm on bare Si, auto sensitivity correction, improved X/Y coordinate reporting, and a wide dynamic range.

This state-of-the-art tool uses a Violet LD 408nm wavelength light source to differentiate between pits and particles, and accommodates wafer sizes from 100mm to 300mm.

Features:

  • One or Two-Axis, Violet Laser Diode Light Source
  • Wide dynamic range
  • Accommodates wafer sizes: 100-300mm
  • Fast throughput
  • Auto sensitivity correction: gives stable results; easy-to-use; very reliable

Please Note

Not all JEOL products are available in every country. For specific information and more details about JEOL products available in your area, contact your local JEOL office or sales representative. Thank you.


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