JBX-5500FS Electron Beam Lithography System

Compact and Cost Effective New Direct Write E-Beam System

JBX-5500FSThe new JBX-5500FS is a cost-effective, high resolution direct write tool that is PC-controlled and simple to use. A spot beam, vector scan system, the JBX-5500FS writes patterns at a minimum line width of 10nm at 50kV.

The JBX-5500FS can achieve writing accuracies in two separate modes:

  • High Resolution Mode: Overlay accuracy of < 40nm (3 sigma) can be achieved at 50kV.
  • High Speed Mode: High speed mode allows 1mm fields at 50kV or 2mm at 25kV.

The JBX-5500FS can accept parts/pieces and wafers up to 100mm substrates via a single wafer manual loader.

Please Note

Not all JEOL products are available in every country. For specific information and more details about JEOL products available in your area, contact your local JEOL office or sales representative. Thank you.


NEWS