JPS-9010 Series
XPS for Surface Analysis
X-ray Photoelectron Spectroscopy (XPS) is an analytical technique to estimate the elemental composition and chemical state of the elements on the surface of a material by projecting soft X-ray onto the surface and detecting the energy of photoelectrons emitted from areas a few nm from the surface.
The photoelectron energy detected is specific to a certain element, and is determined by chemical bonding, reflecting chemical shift. Using X-rays as the source of excitation, XPS is effective in analyzing insulators.
XPS is a powerful analytical tool for material development and surface testing of a wide range of samples, including metals, semiconductors, high polymers, and advanced materials.
The JPS-9010 series offers three models to meet various research objectives and requirements: JPS-9010MC (with monochromatic X-ray source), JPS-9010MX, and JPS-9010TR featuring X-ray total reflection photoelectron spectroscopy (TRXPS), one of the first to incorporate this technique.
- High accuracy energy analyzer
- X-ray source to minimize damage to samples
- Compact X-ray monochromator
- Ultra high clean vacuum system; easy baking
- Versatile auto analysis to support routine analysis
- Large stage to accommodate large samples such as hard disk
- Easy to use software
- High speed peak separation software
JPS-9010 Series
XPS for Surface Analysis
X-ray Photoelectron Spectroscopy (XPS) is an analytical technique to estimate the elemental composition and chemical state of the elements on the surface of a material by projecting soft X-ray onto the surface and detecting the energy of photoelectrons emitted from areas a few nm from the surface.
The photoelectron energy detected is specific to a certain element, and is determined by chemical bonding, reflecting chemical shift. Using X-rays as the source of excitation, XPS is effective in analyzing insulators.
XPS is a powerful analytical tool for material development and surface testing of a wide range of samples, including metals, semiconductors, high polymers, and advanced materials.
The JPS-9010 series offers three models to meet various research objectives and requirements: JPS-9010MC (with monochromatic X-ray source), JPS-9010MX, and JPS-9010TR featuring Total Reflection X-ray Photoelectron Spectroscopy (TRXPS), one of the first to incorporate this technique.
- High accuracy energy analyzer
- X-ray source to minimize damage to samples
- Compact X-ray monochromator
- Ultra high clean vacuum system; easy baking
- Versatile auto analysis to support routine analysis
- Large stage to accommodate large samples such as hard disk
- Easy to use software
- High speed peak separation software
JPS-9010 Series Specifications
Sensitivity and Resolution
| |
Intensity (cps) |
Resolution (eV) |
| Standard X-ray Source* |
540,000 |
0.90 |
| 1,800,000 |
1.15 |
| 5,000,000 |
1.8 |
| Monochromatic X-ray Source** |
60,000 |
0.65 |
* When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with MgKa ray (converted to 300 W)
** When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with AlKa ray (converted to 600 W)
X-ray Source
Standard X-ray Source
(Ai-Mg twin target) |
| Accelerating Voltage |
Max. 12 kV |
| Emission Current |
Max. 50 mA |
| Voltage Stability |
Within 1% |
| Maximum Load |
Mg 500W
Al 600W |
Monochromatic X-ray Source
(X-ray monochromator) |
| Accelerating Voltage |
Max. 12 kV |
| Emission Current |
Max. 50 mA |
| Voltage Stability |
Within 1% |
| Maximum Load |
Al 600W |
| Analyzing Crystal |
SiO2 |
| Rowland Circle |
200 mm |
Energy Analyzer and Incident Lens System
| Incident Lens |
3 stage cylindrical electrostatic lens |
| Hemispherical Analyzer |
Central orbit 100 mm |
| Incident Slit |
Slit width controller incorporated |
| Magnetic Shield |
Double mu metal shield |
| Energy Sweep |
Constant analyzer energy |
| Sweep Range |
0 to 1480 eV |
| Energy Position Reproducibility |
±0.05 eV |
| Detector |
Micro channel plate |
| Counting System |
Pulse count |
Vacuum System
| Sample Imaging |
| Ultimate Pressure |
7x10-8 Pa (5x10-10 Torr) maximum |
| Vacuum System |
Auto evacuation / baking sequence |
| Main Pump |
200 lit/s ion pump |
| Supplementary Pump |
1600 lit/s sublimation pump |
| Vacuum Monitor |
Nude ion gauge |
| Baking System |
Heater integrated |
| Specimen Exchange Chamber |
| High Speed Ion Gun |
Incorporated |
| Vacuum System |
Auto evacuation baking/sequence |
| Main Pump |
2601 lit/s turbo molecular pump |
| Vacuum Monitor |
Penning gauge |
JPS-9010 Series Specifications
Sensitivity and Resolution
| |
Intensity (cps) |
Resolution (eV) |
| Standard X-ray Source* |
540,000 |
0.90 |
| 1,800,000 |
1.15 |
| 5,000,000 |
1.8 |
| Monochromatic X-ray Source** |
60,000 |
0.65 |
* When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with MgKa ray (converted to 300 W)
** When 3d5/s photoelectron spectra are acquired from a clean, flat silver sample with AlKa ray (converted to 600 W)
X-ray Source
Standard X-ray Source
(Ai-Mg twin target) |
| Accelerating Voltage |
Max. 12 kV |
| Emission Current |
Max. 50 mA |
| Voltage Stability |
Within 1% |
| Maximum Load |
Mg 500W
Al 600W |
Monochromatic X-ray Source
(X-ray monochromator) |
| Accelerating Voltage |
Max. 12 kV |
| Emission Current |
Max. 50 mA |
| Voltage Stability |
Within 1% |
| Maximum Load |
Al 600W |
| Analyzing Crystal |
SiO2 |
| Rowland Circle |
200 mm |
Energy Analyzer and Incident Lens System
| Incident Lens |
3 step cylindrical electrostatic lens |
| Hemispherical Analyzer |
Central orbit 100 mm |
| Incident Slit |
Slit width controller incorporated |
| Magnetic Shield |
Double mu metal shield |
| Energy Sweep |
Constant analyzer energy |
| Sweep Range |
0 to 1480 eV |
| Energy Position Reproducibility |
±0.05 eV |
| Detector |
Micro channel plate |
| Counting System |
Pulse count |
Vacuum System
| Sample Imaging |
| Ultimate Pressure |
7x10-8 Pa (5x10-10 Torr) maximum |
| Vacuum System |
Auto evacuation / baking sequence |
| Main Pump |
200 lit/s ion pump |
| Supplementary Pump |
1600 lit/s sublimation pump |
| Vacuum Monitor |
Nude ion gauge |
| Baking System |
Heater integrated |
| Specimen Exchange Chamber |
| High Speed Ion Gun |
Incorporated |
| Vacuum System |
Auto evacuation baking/sequence |
| Main Pump |
260 lit/s turbo molecular pump |
| Vacuum Monitor |
Penning gauge |