JSM-7600F Scanning Electron Microscope
The JSM-7600F is a stateof- the-art thermal FE-SEM that successfully combines ultrahighresolution imaging with optimized analytical functionality. In addition, the JSM-7600F incorporates a large specimen chamber. This uniquely designed chamber, which accommodates a 200 mm diameter specimen, is optimized for a large variety of detectors for secondary electrons, backscattered electrons, EDS, WDS, EBSD, CL, etc.
Features
- Ultrahigh resolution comparable to the cold cathode FE-SEM.
- In-Lens Thermal FEG.
- Aperture angle control lens automatically optimizes the spot size at both high and low currents for both analysis and imaging.
- High probe current up to 200 nA (at 15 kV) for various analytical purposes (WDS, EDS, EBSD, CL, etc.)
- Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images.
- Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression.
- Eco design for energy conservation.
JSM-7600F Specifications
| SEI resolution |
1.5 nm (1 kV) in GB mode, 1.0 nm (15 kV) |
| Magnification |
25 to 1,000,000x (printed as a 120mm x 90mm micrograph) |
| Accelerating voltage |
0.1 to 30 kV |
| Beam current |
1 pA to 200 nA at 15 kV |
| Aperture angle control lens |
Integrated |
| Detector |
Upper and lower detectors |
| Energy Filter |
New r-filter |
| Gentle beam |
Integrated |
| Digital images |
1,280 x 960, 2,560 x 1,920, 5,120 x 3,840 |
| Specimen exchange chamber |
Single step loading/unloading |
| Specimen stage |
Eucentric, 5 axis motor drive |
| Type |
IA |
II |
III |
| X-Y |
70 mm x 50 mm |
110 mm x 80 mm |
140 mm x 80 mm |
| Tilt |
-5 to +70° |
-5 to +70° |
-5 to +70° |
| Rotation |
360° |
360° |
360° |
| Working distance |
1.5 mm to 25 mm |
1.5 mm to 25 mm |
1.5 mm to 25 mm |
|
| Vacuum system |
2 SIPs, magnetic bearing TMP, RP |
| Energy efficient design |
Normal operation: 1.2 kVA
Sleep mode: 1 kVA
Operation system OFF: 0.76 kVA |