JEOL UK News
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Release Date: 2023/03/09
With the exception of Japan, the University of Southampton will be the home to the world’s highest Accelerating Voltage Direct Writing Electron Beam Lithography (EBL) System. The system has Gaussian Beam Optics designed to implement High Throughput and High Precision requirements from a wide range of applications. The machine will be housed in a state-of-the-art facility for microfabrication and high-spec nanofabrication, with a wide range of characterisation capabilities, housed in a purpose built, 820m2 cleanroom in the Mountbatten Complex at the University of Southampton.
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